SETYANJANA, A. Y. .; MELATI, A. .; AZIZ, I. . Mechanical and Optical Properties of Thin Film Titanium Nitride (TiN) Resulting from Deposition DC Sputtering. Proceeding International Conference on Science and Engineering, [S. l.], v. 2, p. 17–21, 2019. DOI: 10.14421/icse.v2.47. Disponível em: http://sunankalijaga.org/prosiding/index.php/icse/article/view/47. Acesso em: 9 jul. 2026.