ARDIYANTI, A. D. Effect of Gas Pressure and Electrode Distance on Self-Bias Voltage in Sputtering System for Thin Films. Proceeding International Conference on Science and Engineering, [S. l.], v. 4, p. 146–149, 2021. Disponível em: http://sunankalijaga.org/prosiding/index.php/icse/article/view/648. Acesso em: 16 jan. 2025.