Setyanjana, A. Y. ., Melati, A. . and Aziz, I. . (2019) “Mechanical and Optical Properties of Thin Film Titanium Nitride (TiN) Resulting from Deposition DC Sputtering”, Proceeding International Conference on Science and Engineering, 2, pp. 17–21. doi: 10.14421/icse.v2.47.