Setyanjana, Andre Yoan, Asih Melati, and Ihwanul Aziz. “Mechanical and Optical Properties of Thin Film Titanium Nitride (TiN) Resulting from Deposition DC Sputtering”. Proceeding International Conference on Science and Engineering 2 (March 1, 2019): 17–21. Accessed April 18, 2024. http://sunankalijaga.org/prosiding/index.php/icse/article/view/47.