Ardiyanti, Aprilia Dewi. “Effect of Gas Pressure and Electrode Distance on Self-Bias Voltage in Sputtering System for Thin Films”. Proceeding International Conference on Science and Engineering 4 (February 27, 2021): 146–149. Accessed January 19, 2025. http://sunankalijaga.org/prosiding/index.php/icse/article/view/648.